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Chinese Academy of Sciences (CAS) has Successfully Developed a “Spectroscopic Ellipsometry Imaging System”
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| 2009-05-14 |
Supported by the Important Scientific Research Instrument Developing Project of the Chinese Academy of Sciences (CAS), Jin Gang and his research team from National Microgravity Laboratory of Institute of Mechanics, CAS have successfully developed a “spectroscopic ellipsometry imaging system” and its demonstration machine.
The research, which is based on highly sensitive spectroscopic ellipsometry measurement and integrated with spectral properties and digital imaging technology, makes it possible for researchers to carry out speed spectral imaging and quantitative measurement of complex bivariate distributed nano-stratofabric film sample. On April 1st, on the basis of field test for performance and technical indices of the instrument, the CAS expert panel reached a consensus that the system provides an effective means for rapid characterization and physical analysis on large muti-layer nano-film samples with complicated horizontal structure, and is a new method for characterization of nano-film 3D structure.
The characteristics of spectroscopic ellipsometry imaging system are as follows: Large quantity of information, which enables it to simultaneously measure continuous spectroscopic ellipsometric parameters in micro-areas of large-area samples and obtain physical parameters of relevant material (such as thickness, dielectric function, surface micro-roughness, component ratio in synthetic material etc.) as well as spatial distribution of relevant material; High spatial resolution, which enables its vertical resolution and repeatability for nano-film reach 0.1nm and horizontal resolution reaches micron scale; Fast test speed, which enables sampling time of ellipsometric parameters (ψ and Δ) in micro-areas(above 420 thousand pixel) within the field of view under single wavelength reaches 7 seconds, 2-3 magnitude orders higher than mechanical scanning spectroscopic ellipsometry; Visual results, which helps the formation of contrastive measurement within the field of view and enables accurate location and elimination of spurious signal that can't be done by single-beam spectroscopic ellipsometry; High automation level and easy to operate.
The system is applicable to fields covered by single-beam spectroscopic ellipsometry and single- or discrete wavelength imaging ellipsometry, as well as occasions such as measurement for nano-film instruments that requires high spatial resolution and spectral resolution measurement at the same time, which will open a new field for applying ellipsometry measurement. The system has been successfully applied to the research of “The Development of Protein Microarray Biosensor for Label-free Detection of Tumor Markers Spectrum”, which is an 863 Program in China. It will also play an important part in areas such as micron/nanofabrication, bio-film structure, new electronic device, biochip and high density storage device.
For more detailed information, please visit our official website www.expolab.com.cn.
Source: Institute of Mechanics, Chinese Academy of Sciences (CAS) |
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